AccuThermo AW 610 Atmosphere RTA RTP
AccuThermo AW 610 is a desktop rapid thermal processor for 2 to 6 inch wafer, which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity advanced temperature control technology and AW 900 new software, provide significant advantages over conventional furnace processing and conventional RTP systems.
1.1 Wafer Size 4 inch to
6 inch configuration(Option 2 inch -4 inch)
1.2 Single Wafer Process.
1.3 Aluminum chamber with water cooling and gold plating for better uniformity
1.4 Extended Range Pyrometer(ERP) for high temperature sensor
1.5 Isolated Quartz Tube for clean environment for wafer
1.6 Bottom and top heating with Radiation heating lamp module
1.7 Precise Temperature/Time control, Temperature measuring precision ¡À1¡ãC.
1.8 Multiple cycle processing capability
Range: 600¡ãC to 1250¡ãC for ERP pyrometer sensor(Optional), 100¡ãC to 800¡ãC for Thermocouple(Can not use thermocouple for up to 750¡ãC for Si wafer due to the reaction between Si
wafer and thermocouple).
1.10 Steady state process time 0 to 3000 sec programmable
1.11 Temp Ramp-up Speed: 10¡ãC to 100¡ãC for wafer, Programmable
1.12 Ramp down speed 10¡ãC - 100¡ãC for wafer,Non-Progammable.
1.13 Pentium Computer with 17¡± LCD Monitor, standard keyboard and mouse.
1.14 Software calibration and easy to be done.
1.15 More functions and I/O hardware ¡°exposed¡± for easier maintenance and trouble shooting.
1.16 It is easy to edit recipe with GUI and graph display.
1.17 Save all process data on the computer hard disk.
1.18 A/D and D/A precision is 14 to 16 bits.
1.19 Detect in process and with color curve displayed on the screen.
1.20 Software has power summary function to detect either lamp failure or sensor failure.
1.21 Software watch dogto eliminate machine damage duo to the computer locks up or freeze.